Parasitic Capacitance ===================== Parasitic capacitance checks reveal unwanted coupling paths, loading, frequency shifts, and edge-field concentration. .. list-table:: :header-rows: 1 * - # - Parameter - Symbol / Unit - Extraction Method - Typical Q3D Value - Ideal / Optimal - Good Range - Worst Case - Why It Matters - Key Design Note * - 29 - Trace-to-Ground Parasitic Cap - C_trace / fF/μm - Q3D electrostatic solve per-unit-length - 0.1 – 0.4 fF/μm - 0.1 – 0.4 fF/μm (50 Ω CPW) - 0.1 – 1 fF/μm - > 3 fF/μm - Distributed capacitance sets CPW characteristic impedance Z_0 = √(L/C); target 50 Ω - C' depends on gap width and substrate thickness; narrowing the gap increases C' (lowers Z_0) * - 30 - Pad-to-Substrate Parasitic Cap - C_sub / fF - Q3D C matrix with substrate dielectric stack - < 10 fF - < 10 fF (small contact pads) - 5 – 30 fF - > 100 fF - Substrate capacitance creates parasitic shunt path reducing resonator Q and shifting qubit freq - Thinning substrate from 500 μm to 200 μm reduces C_sub by ~2.5×; used in 3D chip stacks * - 31 - Inter-Layer Cap (3D integration) - C_layer / fF - Q3D 3D stack model; bump height geometry sweep - < 5 fF per crossing - < 5 fF (flip-chip bump) - 1 – 20 fF - > 50 fF - Capacitance between chip layers through indium/SnAg bumps must be included in Hamiltonian - Bump height variation (σ ~ 1–2 μm) causes C_layer spread of ~0.5–1 fF; matters at scale * - 32 - Fringe Capacitance (gap edges) - C_fringe / fF/μm - Q3D conformal mesh at conductor edges - 0.02 – 0.1 fF/μm - 0.02 – 0.1 fF/μm (5–20 μm gap) - 0.05 – 0.5 fF/μm - > 1 fF/μm - Fringe fields at edges add to intended coupling capacitance; must be in C_g design model - ~30–50% of C_g in typical transmon designs comes from fringe; underestimating shifts f by 50+ MHz * - 33 - Wirebond Pad Parasitic Cap - C_pad\_wb / fF - Q3D parallel-plate + fringe approximation; or analytical C = ε₀ εr A/d - < 50 fF (100×100 μm Al pad) - < 50 fF - 20 – 150 fF - > 300 fF - Bond-pad capacitance loads the signal line; degrades bandwidth and causes reflection at bond - Reducing pad size from 150×150 μm to 80×80 μm cuts C_pad by ~2.5× with no bond yield penalty