Parasitic Resistance ==================== Parasitic resistance checks identify unwanted ohmic paths, contacts, vias, and interconnect losses before superconducting operation. .. list-table:: :header-rows: 1 * - # - Parameter - Symbol / Unit - Extraction Method - Typical Q3D Value - Ideal / Optimal - Good Range - Worst Case - Why It Matters - Key Design Note * - 21 - Series JJ Parasitic Resistance - R_ser / Ω - RF impedance spectroscopy; Q3D lead model - < 0.01 Ω - < 0.01 Ω (clean superconducting) - 0.01 – 0.1 Ω - > 1 Ω - Quasiparticle conductance in JJ leads causes T₁ decay via Ohmic dissipation in qubit circuit - Quasiparticle poisoning (stray radiation) transiently raises R_ser; shielding critical at mK * - 22 - Shunt Parasitic Resistance (R_p) - R_p / kΩ - Q3D G matrix → R_p = 1/G_ii - > 1 MΩ - > 1 MΩ (effectively open) - 100 kΩ – 1 MΩ - < 10 kΩ - Parallel leakage path across qubit capacitor reduces effective Q = R_p·√(C/L) - Substrate residues from lithography are the most common cause; requires thorough O₂ plasma clean * - 23 - Wirebond / Bump Resistance - R_wb / mΩ - 4-probe TDR; Q3D bond-wire cylinder model - < 5 mΩ per bond - < 5 mΩ - 2 – 20 mΩ - > 100 mΩ - Parasitic series resistance contributes to insertion loss and thermal noise at 4K - Au–Au thermo-compression bonds have lower and more repeatable R_wb than Al wedge bonds * - 24 - Metal Interface Contact Resistance - R_c / mΩ - TLM structure measurement; Q3D metal stack - < 1 mΩ (clean Al–Al) - < 1 mΩ - 1 – 10 mΩ - > 50 mΩ - Interface resistance at Al–Au and Al–Nb transitions is critical in 3D integration - Native Al₂O₃ (2–4 nm) must be removed by Ar ion milling before deposition for low R_c