Resistance Matrix (R) ===================== Resistance outputs describe DC and AC conductor losses. For superconducting layouts, use these values as fabrication and normal-state quality checks before low-temperature correction. .. list-table:: :header-rows: 1 * - # - Parameter - Symbol / Unit - Extraction Method - Typical Q3D Value - Ideal / Optimal - Good Range - Worst Case - Why It Matters - Key Design Note * - 1 - DC Self-Resistance (R_ii) - R_ii / mΩ - DC sweep; sheet-resistance extraction - 0.5 – 5 mΩ - < 1 mΩ - 0.5 – 5 mΩ - > 50 mΩ - Ohmic loss in qubit loop raises thermal noise floor and damps resonator Q factor - Al becomes superconducting at 4K → R→0; use RₙA as fabrication quality proxy * - 2 - AC Self-Resistance at 5–6 GHz - R_ac / mΩ - HFSS/Q3D surface impedance model - 2 – 20 mΩ - < 5 mΩ (superconducting at 4K) - 5 – 20 mΩ - > 100 mΩ - Values shown apply to normal-metal (room-temp) modeling; at cryogenic temp Al is superconducting (R→0). For non-SC segments or pre-cooldown checks, normal-metal losses degrade quality factor Q. - Skin effect sets frequency dependence: R_ac ∝ √f for bulk, ≈ R_dc for thin film < δ_s. These ranges are room-temperature values; at mK, SC Al gives R_ac → 0. * - 3 - Mutual Resistance (R_ij) - R_ij / μΩ - Full R matrix extraction in Q3D - < 10 μΩ - ≈ 0 (no shared current path) - < 50 μΩ - > 500 μΩ - Shared resistive coupling between conductors indicates galvanic crosstalk - Non-zero R_ij reveals overlapping ground return paths; fix by isolating ground planes * - 4 - Contact / Via Resistance - R_via / mΩ - TDR or DC 4-probe; Q3D via model - < 2 mΩ per via - < 1 mΩ (superconducting through-Si) - 1 – 5 mΩ - > 20 mΩ - Resistance at layer transitions limits Q in 3D integration and flip-chip assemblies - Critical for multi-chip modules; oxidation or poor metal contact is the main failure mode * - 5 - Ground Plane Sheet Resistance - R_sh / mΩ/sq - 4-probe measurement; Q3D bulk conductivity input - < 0.1 mΩ/sq (Al at 4K) - < 0.1 mΩ/sq - 0.1 – 0.5 mΩ/sq - > 5 mΩ/sq - High R_sh creates inductive ground return paths and shifts mode frequencies across the chip - Perforated ground planes for vortex pinning add ~5–10 pH/sq inductance per square