Titanium Nitride (TiN)

Superconducting Materials

High Kinetic Inductance Superconductor

Tc = 4–5.6 K (tunable)

Titanium Nitride (TiN)

High Kinetic Inductance Superconductor

Role in quantum circuits

Kinetic inductance detectors (KIDs), high-impedance resonators, superconducting

inductors

Why it matters

TiN has a large kinetic inductance arising from its high normal-state resistivity. This

makes it ideal for compact high-impedance resonators and microwave kinetic inductance detectors (MKIDs). Its Tc is tunable by adjusting nitrogen content during reactive sputtering deposition.

Key facts

  • High kinetic inductance — enables compact circuit elements

  • Tc tunable via N₂ partial pressure during sputtering deposition

  • Hard, chemically stable coating — easy to pattern by etching

  • Useful in microwave kinetic inductance detector-style structures

  • Relevant for next-generation qubit designs